1 Computer - Aided Design for Microelectromechanical Systems ( MEMS )
نویسندگان
چکیده
s With the advancements of MEMS foundry services and CAD tools, MEMS devices can be costeffectively designed and prototyped. Here, four designs that utilize these tools are presented: 1) a flexure design used to reduce the device warpage resulting from the mismatch in thermal expansion coefficients between the device and the substrate for flip-chip bonded MEMS, 2) a digitally positioned micro-mirror using multiple contacts, 3) a large MEMS flap that achieves uniform movement for fluid mixing, and 4) a three-dimensional, solder-assembled MEMS device that has been optimized for minimal deviation from the desired assembly angle.
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